ION-BEAM ANALYSIS FOR DEPTH PROFILING

被引：18
|
作者：
KNAPP, JA
BARBOUR, JC
DOYLE, BL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 04期
关键词：
D O I：
10.1116/1.577959
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
New techniques in the application of ion beam analysis to depth profiling in solids are briefly surveyed. These include (1) non-Rutherford backscattering analysis using high energy beams, (2) resonant nuclear reaction analysis, (3) time-of-flight elastic recoil detection spectrometry, and (4) heavy ion backscattering spectrometry. The last can be used for very precise depth profiling in one configuration, or as a very sensitive trace contaminant analysis in another configuration.
引用
收藏
页码：2685 / 2690
页数：6
相关论文
共 50 条
  • [11] OPTICAL DEPTH PROFILING OF ION-BEAM ETCHING INDUCED DAMAGE IN INGAAS/INP HETEROSTRUCTURES
    GERMANN, R
    FORCHEL, A
    GRUTZMACHER, D
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (21) : 2196 - 2198
  • [12] INFLUENCE OF THE ION-BEAM INDUCED DESORPTION ON THE QUANTITATIVE DEPTH PROFILING OF HYDROGEN IN A VARIETY OF MATERIALS
    ROSS, GG
    RICHARD, I
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4): : 603 - 607
  • [13] ION-BEAM ANALYSIS
    ROBINSON, AL
    [J]. SCIENCE, 1976, 193 (4258) : 1070 - 1070
  • [14] ION-BEAM ANALYSIS
    FUJIMOTO, F
    [J]. BUNSEKI KAGAKU, 1991, 40 (11) : 577 - 597
  • [15] THERMODYNAMIC EFFECTS IN-DEPTH PROFILING AND ION-BEAM MIXING WITHOUT INVOKING THERMAL SPIKES
    KELLY, R
    MIOTELLO, A
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (20) : 2649 - 2651
  • [16] MEV ION-BEAM ANALYSIS
    COOKSON, JA
    CONLON, TW
    [J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1988, 93 (03): : 473 - 478
  • [17] ION-BEAM ANALYSIS IN ARCHAEOLOGY
    CHEN, HS
    CHEN, JX
    REN, CG
    XU, ZW
    YANG, FC
    ZHAO, GQ
    ZHUO, ZY
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 391 - 396
  • [18] ION-BEAM ANALYSIS OF NITROGEN
    BETHGE, K
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 66 (1-2): : 146 - 157
  • [19] AN ION-BEAM ANALYSIS FACILITY
    BAUMAN, S
    NELSON, JW
    HUDSON, GM
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1981, 28 (02) : 1374 - 1377
  • [20] ION-BEAM ANALYSIS OF ZNSE
    SASAKI, Y
    YOSHIDA, K
    NISHIYAMA, F
    YAO, T
    ZHU, Z
    MORI, H
    KAWASHIMA, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (4B): : L449 - L451
12345