OXIDATION OF METALS BY AN OXYGEN ION-BEAM IN THE MBE PROCESS

被引：3
|
作者：
SHIMIZU, T
NONAKA, H
ARAI, K
机构：
[1] Electrotechnical Laboratory, Tsukuba, Ibaraki, 305
来源：
SURFACE AND INTERFACE ANALYSIS | 1992年 / 19卷 / 1-12期
关键词：
D O I：
10.1002/sia.740190168
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
X-ray photoelectron spectroscopy was used to study the oxidation of Cu by oxygen plasma generated from a Kaufman ion gun. It was found that Cu was much less oxidized in co-evaporation with Ba or Nd compared to Cu-only evaporation when the total flux density of supplied metals and the oxygen plasma conditions were similar. It was also found that elemental Ba or Nd deposited on a CuO film at room temperature deoxidized the CuO.
引用
收藏
页码：365 / 368
页数：4
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