ION-BEAM OXIDATION

被引：30
|
作者：
HARPER, JME
HEIBLUM, M
SPEIDELL, JL
CUOMO, JJ
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 06期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.329220
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4118 / 4121
页数：4
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