METALLIZATIONS ON LOW PERMITTIVITY SUBSTRATES FOR PACKAGING VLSI DEVICES

被引:0
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作者
DAS, A [1 ]
RUZYLLO, J [1 ]
CROSS, LE [1 ]
MESSIER, R [1 ]
机构
[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C123 / C123
页数:1
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