GOLD CHROMIUM METALLIZATIONS FOR ELECTRONIC DEVICES

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HOLLOWAY, PH
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
摘要
The thin films of gold which are applied so extensively in electronic devices are normally deposited over thin films of other metals in two, three or even four component metallization systems. The problems arising in such systems are illustrated in this article on the gold/chromium metallization system developed in large measure at the Sandia Laboratories in Albuquerque, New Mexico.
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页码:109 / 115
页数:7
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