CHARACTERIZATION OF DEFECTS IN SILICON BY TRANSMISSION ELECTRON-MICROSCOPY AFTER CMOS AND BIPOLAR PROCESSING

被引：0
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作者：
STEEDS, JW
JOHNSON, F
SIMPSON, MB
AUGUSTUS, PD
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来源：
CHARACTERIZATION OF THE STRUCTURE AND CHEMISTRY OF DEFECTS IN MATERIALS | 1989年 / 138卷
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T [工业技术];
学科分类号：
08 ;
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页码：245 / 248
页数：4
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