CHARACTERIZATION OF DEFECTS IN SILICON BY TRANSMISSION ELECTRON-MICROSCOPY AFTER CMOS AND BIPOLAR PROCESSING

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作者：

STEEDS, JW

JOHNSON, F

SIMPSON, MB

AUGUSTUS, PD

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CHARACTERIZATION OF THE STRUCTURE AND CHEMISTRY OF DEFECTS IN MATERIALS | 1989年 / 138卷

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T [工业技术];

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08 ;

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页码：245 / 248

页数：4

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