A DIELECTRICALLY ISOLATED PHOTODIODE ARRAY BY SILICON-WAFER DIRECT BONDING

被引：20
|
作者：
OHURA, J
TSUKAKOSHI, T
FUKUDA, K
SHIMBO, M
OHASHI, H
机构：
来源：
IEEE ELECTRON DEVICE LETTERS | 1987年 / 8卷 / 10期
关键词：
D O I：
10.1109/EDL.1987.26692
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：454 / 456
页数：3
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