IONIZATION ENHANCED MIGRATION OF INTERSTITIAL ALUMINUM IN SILICON

被引:0
|
作者
CHATTERJEE, AP [1 ]
TROXELL, JR [1 ]
WATKINS, GD [1 ]
机构
[1] LEHIGH UNIV,BETHLEHEM,PA 18015
来源
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:214 / 215
页数:2
相关论文
共 50 条
  • [41] Effects of interstitial clustering on transient enhanced diffusion of boron in silicon
    Solmi, S
    Valmorri, S
    MICROSTRUCTURE EVOLUTION DURING IRRADIATION, 1997, 439 : 65 - 70
  • [42] Effect of incomplete ionization for the description of highly aluminum-doped silicon
    Ruediger, Marc
    Rauer, Michael
    Schmiga, Christian
    Hermle, Martin
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (02)
  • [43] Physically sound parameterization of incomplete ionization in aluminum-doped silicon
    Steinkemper, Heiko
    Altermatt, Pietro P.
    Hermle, Martin
    AIP ADVANCES, 2016, 6 (12)
  • [44] ON THE COMPLEX OF THE OXYGEN INTERSTITIAL AND THE SILICON INTERSTITIAL IN SILICON
    LINDSTROM, JL
    SVENSSON, BG
    CORBETT, JW
    OEHRLEIN, GS
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 85 (02): : K109 - K111
  • [45] L-SHELL IONIZATION OF ALUMINUM AND SILICON BY 80 KEV ELECTRONS
    MISRA, M
    EGERTON, RF
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (04) : L71 - L73
  • [46] Boron-interstitial silicon clusters and their effects on transient enhanced diffusion of boron in silicon
    Solmi, S
    Bersani, M
    Sbetti, M
    Hansen, JL
    Larsen, AN
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (08) : 4547 - 4552
  • [47] ANALYSIS OF RADIATION-ENHANCED DIFFUSION OF ALUMINUM IN SILICON
    ITOH, T
    OHDOMARI, I
    JOURNAL OF APPLIED PHYSICS, 1970, 41 (01) : 434 - &
  • [48] Surfactant-enhanced desorption/ionization on silicon mass spectrometry
    Nordström, A
    Apon, JV
    Uritboonthal, W
    Go, EP
    Siuzdak, G
    ANALYTICAL CHEMISTRY, 2006, 78 (01) : 272 - 278
  • [49] IONIZATION-ENHANCED CRYSTALLIZATION OF PHOSPHORUS IMPLANTED SILICON LAYERS
    SUSKI, J
    RZEWUSKI, H
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 40 (1-2): : 81 - 85
  • [50] PROTON-ENHANCED DIFFUSION AND VACANCY MIGRATION IN SILICON
    MASTERS, BJ
    GOREY, EF
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (03): : 328 - 329