CORROSION TEST FOR METALLIZATION OF SEMICONDUCTOR-DEVICES

被引：0

作者：

IWATA, S ^{[1
]}

ISHIZAKA, A ^{[1
]}

YAMAMOTO, H ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,TOKYO 185,JAPAN

来源：

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C99 / C99

页数：1

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[21] BACKGROUND IN SEMICONDUCTOR-DEVICES
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