LASER ANNEALING OF SEMICONDUCTORS

被引：0

作者：

CELLER, GK ^{[1
]}

机构：

[1] WESTERN ELECT CO INC,ENGN RES CTR,PRINCETON,NJ 08540

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1979年 / 69卷 / 10期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1461 / 1461

页数：1

共 50 条

[21] SOME KINETIC PROCESSES DUE TO LASER ANNEALING OF SEMICONDUCTORS
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[29] IMPURITY DIFFUSION IN SEMICONDUCTORS UNDER PULSED LASER ANNEALING CONDITIONS
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