PHYSICS, FABRICATION, AND CHARACTERIZATION OF THIN-FILMS

被引：0
|
作者：
KRAUS, H
GUTSCHE, M
JOCHUM, J
KEMMATHER, B
机构：
[1] Physik Department E15, Technische Universität München, Garching
来源：
JOURNAL OF LOW TEMPERATURE PHYSICS | 1993年 / 93卷 / 3-4期
关键词：
29.40; 74.50; 74.75;
D O I：
10.1007/BF00693472
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Superconducting tunnel junctions as well as transition edge thermometers could benefit from high quality thin films. We point out the important features of various cryo detectors and show where high purity, or even epitaxially grown films are advantageous for detector performance. Some fabrication methods are discussed and methods of film characterization introduced. Photolithography has proven necessary to fabricate the complex structure of the present cryo detectors.
引用
收藏
页码：533 / 542
页数：10
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