INEXPENSIVE SPOT-PROFILE ANALYSIS REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION

被引：1
|
作者：
IDZERDA, Y
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 06期
关键词：
D O I：
10.1116/1.578464
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A simple, photomultiplier based spot-profile analysis reflection high energy electron diffraction (SPARHEED) apparatus is described. A micrometer scanned, two pinhole aperture is coupled to an optical fiber and yields 38 mum spot-profile intensity resolution of RHEED patterns corresponding to an ultimate spatial resolution of approximately 4000 angstrom along the RHEED pattern and 900 A across the RHEED pattern. Long range scanning also allows for surface lattice net determination. Acquisition of selected RHEED intensity oscillations is straightforward. The device is easily mounted, rigid, and inexpensive.
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页码：3138 / 3140
页数：3
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