HETEROEPITAXIAL GROWTH OF LITAO3 SINGLE-CRYSTAL FILMS BY RF MAGNETRON SPUTTERING

被引：31
|
作者：
SAITO, Y [1 ]
SHIOSAKI, T [1 ]
机构：
[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO 606,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 9B期
关键词：
LITAO3; RF MAGNETRON SPUTTERING; X-RAY DIFFRACTION; RHEED; SEM; TRANSMISSION SPECTRUM;
D O I：
10.1143/JJAP.30.2204
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Lithium tantalate (LiTaO3) thin films were deposited on sapphire-C substrates by rf magnetron sputtering at various substrate temperatures. The crystallinity was examined by X-ray diffraction and reflection high-energy electron diffraction (RHEED), and the refractive indices were determined by the prism coupling m-lines technique and the interferometric transmission spectrum. Single-crystal (0001)LiTaO3 films were heteroepitaxially grown on sapphire-C substrates above 600-degrees-C, and the dispersion relation of the refractive index agreed well with that of the bulk single crystal.
引用
收藏
页码：2204 / 2207
页数：4
相关论文
共 50 条
  • [21] Magnetron facing target sputtering system for fabricating single-crystal films
    Lin, C
    Sun, DC
    Ming, SL
    Jiang, EY
    Liu, YG
    THIN SOLID FILMS, 1996, 279 (1-2) : 49 - 52
  • [22] Thermal gradient for LiTaO3 single crystal growth: A simulation study
    Kang, Joon-Hyuk
    Sohn, Won-Bae
    Jeon, Su-Jong
    Kim, Jin-Hyeok
    Kim, Seon Hoon
    JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY, 2024, 34 (05): : 143 - 148
  • [23] THERMAL EXPANSION OF LITAO3 SINGLE CRYSTAL
    IWASAKI, H
    TOYODA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (11) : 1338 - &
  • [24] OPTICAL WAVEGUIDING PROPERTIES OF SPUTTERED LINBO3 SINGLE-CRYSTAL THIN-FILMS ON LITAO3 SUBSTRATES
    OKADA, A
    FERROELECTRICS, 1976, 14 (3-4) : 739 - 742
  • [25] 3-inch single-crystal LiTaO3 films onto metallic electrode using Smart Cut™ technology
    Tauzin, A.
    Dechamp, J.
    Madeira, F.
    Mazen, F.
    Zussy, M.
    Deguet, C.
    Clavelier, L.
    Moulet, J. -S.
    Richtarch, C.
    Akatsu, T.
    Yoshimi, M.
    Rigny, A.
    ELECTRONICS LETTERS, 2008, 44 (13) : 822 - +
  • [26] HETEROEPITAXIAL GROWTH OF LINBO3 SINGLE-CRYSTAL FILMS BY ION PLATING METHOD
    MATSUNAGA, H
    OHNO, H
    OKAMOTO, Y
    NAKAJIMA, Y
    JOURNAL OF CRYSTAL GROWTH, 1990, 99 (1-4) : 630 - 633
  • [27] High specific detectivity infrared detector using crystal ion slicing transferred LiTaO3 single-crystal thin films
    Luo, Jiarui
    Luo, Wenbo
    Zhang, Kaisheng
    Sun, Xiaowei
    Shuai, Yao
    Wang, Tao
    Wu, Chuangui
    Zhang, Wanli
    SENSORS AND ACTUATORS A-PHYSICAL, 2019, 300
  • [28] EPITAXIAL-GROWTH OF PLZT SINGLE-CRYSTAL ON SRTIO3 BY RF SPUTTERING
    HIGUMA, Y
    TANAKA, K
    NAKAGAWA, T
    KARIYA, T
    HAMAKAWA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (09) : 1707 - 1708
  • [29] Finite element method simulation of the domain growth kinetics in single-crystal LiTaO3: Role of surface conductivity
    Brugere, Antoine
    Gidon, S.
    Gautier, Brice
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (05)
  • [30] Electrical properties of single-crystal VO2(M) by RF magnetron sputtering
    Wang, Jing
    Dai, Yunpeng
    Yu, Jiaming
    Wang, Ying
    Chen, Dongsheng
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2024, 35 (31)
12345