PHOTORESIST TECHNOLOGY AND PROCESSING TECHNIQUES FOR FINE DIMENSIONAL CONTROL

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作者：
CLARK, KG
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来源：
SOLID STATE TECHNOLOGY | 1978年 / 21卷 / 08期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：73 / 79
页数：7
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