THICKNESS MEASUREMENT ON THIN-FILMS WITH UHF SIGNALS

被引：0

作者：

STERKHOV, VA

TOKAREV, ND

ZHARAVIN, AI

机构：

来源：

MEASUREMENT TECHNIQUES | 1973年 / 16卷 / 08期

关键词：

D O I：

10.1007/BF00837095

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1151 / 1153

页数：3

共 50 条

[21] ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS
HO, JH
LEE, CL
LEI, TF
CHAO, TS
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1990, 7 (02): : 196 - 205
[22] MEASUREMENT OF THICKNESS OF THIN-FILMS DEPOSITED ON SMOOTH NON-PLANAR SUBSTRATES
GUSTAFSSON, SE
IJAZURREHMAN
IQBAL, MS
[J]. OPTICS AND LASER TECHNOLOGY, 1978, 10 (01): : 37 - 39
[23] OPTICAL THICKNESS MEASUREMENT OF VERY THIN-FILMS WITH A FABRY-PEROT-INTERFEROMETER
HUANG, W
ZITTER, RN
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (06) : 2628 - 2629
[24] MEASUREMENT OF THICKNESS OF THIN FILMS
GUNN, AF
SCOTT, RA
[J]. NATURE, 1946, 158 (4018) : 621 - 621
[25] THICKNESS MEASUREMENTS OF THIN-FILMS DEPOSITED ON SUBSTRATES
FOULU, J
HENOC, J
[J]. JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1977, 2 (06): : 619 - 625
[26] DETERMINING THE THICKNESS OF VERY THIN-FILMS OF TIW
TOMPKINS, HG
[J]. SURFACE AND INTERFACE ANALYSIS, 1992, 18 (02) : 93 - 97
[27] DEVICE FOR SPRAYING THIN-FILMS OF PRESET THICKNESS
BELOZERO.IA
[J]. PRIBORY I TEKHNIKA EKSPERIMENTA, 1974, (01): : 238 - 240
[28] AUTOMATION OF THE PHOTOMETRIC MONITORING OF THE THICKNESS OF THIN-FILMS
FAZYLZYANOV, RK
GAINUTDINOV, IS
KASIMOV, RI
[J]. SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1989, 56 (11): : 707 - 709
[29] THICKNESS TRANSITIONS IN THIN-FILMS - THE DRIVING FORCE
KASHCHIEV, D
[J]. SURFACE SCIENCE, 1990, 225 (1-2) : 107 - 116
[30] MEASUREMENT OF INTERNAL STRESS IN THIN-FILMS
PAESLER, MA
FRITZSCHE, H
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (01): : 114 - 115

← 1 2 3 4 5 →