DEVELOPMENT OF FOCUSED ION-BEAM SYSTEMS

被引：3
|
作者：
AIHARA, R [1 ]
SAWARAGI, H [1 ]
THOMPSON, B [1 ]
SHEARER, MH [1 ]
机构：
[1] JEOL USA INC,PEABODY,MA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷
关键词：
D O I：
10.1016/0168-583X(89)90172-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：212 / 217
页数：6
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