ION-BEAM HYDROGENATION OF AMORPHOUS-SILICON

被引：0
|
作者：
TSUO, YS
SMITH, EB
DENG, XJ
XU, Y
DEB, SK
机构：
[1] Solar Energy Research Inst, United States
来源：
SOLAR CELLS | 1988年 / 24卷 / 3-4期
关键词：
Dark Conductivities - Hydrogen Atoms - Hydrogenated Amorphous Silicon - Ion-Beam Hydrogenation - Monohydrides - Post-Deposition Hydrogenation;
D O I：
10.1016/0379-6787(88)90075-0
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
(Edited Abstract)
引用
收藏
页码：249 / 256
页数：8
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