ION-BEAM HYDROGENATION OF AMORPHOUS-SILICON

被引：0
|
作者：
TSUO, YS
SMITH, EB
DENG, XJ
XU, Y
DEB, SK
机构：
[1] Solar Energy Research Inst, United States
来源：
SOLAR CELLS | 1988年 / 24卷 / 3-4期
关键词：
Dark Conductivities - Hydrogen Atoms - Hydrogenated Amorphous Silicon - Ion-Beam Hydrogenation - Monohydrides - Post-Deposition Hydrogenation;
D O I：
10.1016/0379-6787(88)90075-0
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
(Edited Abstract)
引用
收藏
页码：249 / 256
页数：8
相关论文
共 50 条
  • [1] ION-BEAM HYDROGENATION OF AMORPHOUS-SILICON
    TSUO, YS
    SMITH, EB
    DEB, SK
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (18) : 1436 - 1438
  • [2] RECENT RESULTS ON ION-BEAM HYDROGENATION OF AMORPHOUS-SILICON
    TSUO, YS
    XU, Y
    MASCARENHAS, A
    DEB, SK
    [J]. CONFERENCE RECORD OF THE TWENTIETH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1988, VOLS 1-2, 1988, : 119 - 122
  • [3] HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY ION-BEAM SPUTTERING
    LOWE, VE
    HENIN, N
    TU, CW
    TAVAKOLIAN, H
    SITES, JR
    [J]. SOLAR ENERGY MATERIALS, 1981, 4 (02): : 113 - 118
  • [4] ION-BEAM DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FILMS
    KASDAN, A
    GOSHORN, DP
    LANFORD, WA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 305 - 306
  • [5] LOW-ENERGY ION-BEAM POST HYDROGENATION OF PHOSPHOR IMPLANTED AMORPHOUS-SILICON FILMS
    GALLONI, R
    RUTH, M
    DESALVO, A
    TSUO, YS
    [J]. PHYSICA B, 1991, 170 (1-4): : 273 - 276
  • [6] ION-BEAM PROFILING OF GETTERED OXYGEN IN AMORPHOUS-SILICON FILMS
    MONAHAN, KM
    MCNAB, TK
    BARDIN, TT
    CROWLEY, JL
    JONATH, AD
    MACMILLAN, HF
    [J]. SOLAR ENERGY MATERIALS, 1981, 5 (02): : 199 - 203
  • [7] PREPARATION OF HYDROGENATED AMORPHOUS-SILICON FILMS BY ION-BEAM SPUTTERING
    SARAIE, J
    KOBAYASHI, M
    FUJII, Y
    MATSUNAMI, H
    [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 169 - 176
  • [8] CRYSTAL AMORPHOUS-SILICON INTERFACE KINETICS UNDER ION-BEAM IRRADIATION
    PRIOLO, F
    LAFERLA, A
    SPINELLA, C
    RIMINI, E
    CAMPISANO, SU
    FERLA, G
    [J]. APPLIED SURFACE SCIENCE, 1989, 41-2 : 619 - 626
  • [9] ION-BEAM ANALYSIS OF AMORPHOUS-SILICON FILMS PRODUCED BY MAGNETRON SPUTTERING
    TUROS, A
    FREY, H
    MEYER, O
    MULLER, W
    PIRRUNG, JM
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 83 (02): : 437 - 443
  • [10] ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION
    MATTESON, S
    PAINE, BM
    NICOLET, MA
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 53 - 61
12345