NOVEL F2 DETECTOR FOR THE GAS MONITOR OF AN EXCIMER LASER

被引：0
|
作者：
HAKUTA, K
MUKAI, N
MIKI, S
TAKUMA, H
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 10期
关键词：
D O I：
10.1063/1.1139104
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：2529 / 2531
页数：3
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