EFFECT OF RESIDUAL-GAS PRESSURE ON THE THICKNESS MONITORING OF THIN-FILMS

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作者：
FAZYLZYANOV, RK
PANASENKO, BV
NESMELOV, EA
TAGIROV, RB
机构：
来源：
SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1980年 / 47卷 / 07期
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O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：415 / 416
页数：2
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