USE OF GASB FILMS AS RESIDUAL-GAS PRESSURE MONITORS

被引：6

作者：

PATEL, SM

MAHAJAN, MD

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1981年 / 14卷 / 03期

关键词：

D O I：

10.1088/0022-3735/14/3/025

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：378 / 380

页数：3

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