USE OF GASB FILMS AS RESIDUAL-GAS PRESSURE MONITORS

被引：6
|
作者：
PATEL, SM
MAHAJAN, MD
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1981年 / 14卷 / 03期
关键词：
D O I：
10.1088/0022-3735/14/3/025
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：378 / 380
页数：3
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