CHANGES OF RESIDUAL-GAS SPECIES IN A VACUUM CHAMBER DURING ELECTRON-BOMBARDMENT

被引：1

|

作者：

KOBAYASHI, S

SUZUKI, K

KATSUBE, T

机构：

来源：

APPLIED SURFACE SCIENCE | 1988年 / 33-4卷

关键词：

D O I：

10.1016/0169-4332(88)90329-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

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页码：370 / 378

页数：9

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