CHANGES OF RESIDUAL-GAS SPECIES IN A VACUUM CHAMBER DURING ELECTRON-BOMBARDMENT

被引：1
|
作者：
KOBAYASHI, S
SUZUKI, K
KATSUBE, T
机构：
来源：
APPLIED SURFACE SCIENCE | 1988年 / 33-4卷
关键词：
D O I：
10.1016/0169-4332(88)90329-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：370 / 378
页数：9
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