RELATIONSHIP OF Nb SURFACE MORPHOLOGY AND Al COVERAGE TO THE INTRINSIC STRESS OF MAGNETRON -SPUTTERED Nb FILMS

被引：15
|
作者：
Tsukada, K. [1 ]
Kawai, J. [1 ]
Uehara, G. [1 ]
Kado, H. [1 ]
机构：
[1] Superconducting Sensor Lab, 2-1200 Muzaigakuendai, Chiba 27013, Japan
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1993年 / 3卷 / 01期
关键词：
D O I：
10.1109/77.234018
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
To optimize Nb/Al-AlOx/Nb Josephson junctions, atomic force microscopy is used to study the morphology of dc magnetron-sputtered Nb and Al. When the intrinsic stress of Nb films is varied by adjusting Ar pressure, the roughness of Nb films is correlated with the intrinsic stress. Stress-free Nb films have a smooth surface, without depressions, and a roughness of 14.6 angstrom. The roughness of Al deposited on the Nb films reflects the roughness of the underlying Nb, and an Al thickness of more than 40 angstrom is needed to cover the Nb surface without interruption.
引用
收藏
页码：2944 / 2946
页数：3
相关论文
共 50 条
  • [41] ANALYSES OF SPUTTERED FILMS OF NB3GE
    WU, CT
    KAMMERDINER, L
    LUO, HL
    APPLIED PHYSICS LETTERS, 1977, 30 (10) : 543 - 545
  • [42] PROPERTIES OF SUPERCONDUCTING RF SPUTTERED ULTRATHIN FILMS OF NB
    WOLF, SA
    KENNEDY, JJ
    NISENOFF, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 145 - 147
  • [43] Characterization of the Solid State Properties of Anodic Oxides on Magnetron Sputtered Ta, Nb and Ta-Nb Alloys
    Di Franco, F.
    Zampardi, G.
    Santamaria, M.
    Di Quarto, F.
    Habazaki, H.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2012, 159 (01) : C33 - C39
  • [44] OXYGEN DISTRIBUTION IN SPUTTERED NB-GE FILMS
    GAVALER, JR
    MILLER, JW
    APPLETON, BR
    APPLIED PHYSICS LETTERS, 1976, 28 (04) : 237 - 239
  • [45] Packing density/surface morphology relationship in thin sputtered chromium films
    Hoflich, Alexander
    Bradley, Nathan
    Hall, Colin
    Evans, Drew
    Murphy, Peter
    Charrault, Eric
    SURFACE & COATINGS TECHNOLOGY, 2016, 291 : 286 - 291
  • [46] EFFECTS OF INTRINSIC STRESS ON SUBMICROMETER NB/ALOX/NB JOSEPHSON-JUNCTIONS
    IMAMURA, T
    HASUO, S
    IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (02) : 1119 - 1122
  • [47] THE INFLUENCE OF Al MORPHOLOGY ON QUALITY IN Nb/Al/AlOx/Al/Nb EPITAXIAL BASE LAYER JUNCTIONS
    Kirk, E. C. G.
    Blamire, M. G.
    Somekh, R. E.
    Evetts, J. E.
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1993, 3 (01) : 2178 - 2181
  • [48] Structural and mechanical properties of magnetron sputtered (Nb x Mo 1-x )C thin films
    Osinger, Barbara
    Donzel-Gargand, Olivier
    Fritze, Stefan
    Jansson, Ulf
    Lewin, Erik
    VACUUM, 2024, 224
  • [49] Properties of RF-sputtered Nb/Al-AlOx/Nb Josephson SNAP junctions
    Lacquaniti, V
    Maggi, S
    Monticone, E
    Steni, R
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1996, 6 (01) : 24 - 31
  • [50] STRUCTURE AND PHASE-TRANSFORMATIONS OF SPUTTERED NB-FE AND NB-CO FILMS
    KREBS, HU
    BIEGEL, W
    BORMANN, R
    BUSCH, R
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 117 : 199 - 202
12345