IONIZATION ENHANCED MIGRATION OF IMPURITIES IN SILICON

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不详

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NAVAL RESEARCH REVIEWS | 1978年 / 31卷 / 02期

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T [工业技术];

学科分类号：

08 ;

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引用

页码：33 / 33

页数：1

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[1] IONIZATION ENHANCED MIGRATION OF INTERSTITIAL ALUMINUM IN SILICON
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