DESIGN OF AN AUTOMATIC ELLIPSOMETER FOR STUDY OF GROWTH OF THIN FILMS

被引：0
|
作者：
HOPPER, MA
DESMET, DJ
机构：
来源：
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1970年 / 15卷 / 11期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1326 / &
相关论文
共 50 条
  • [31] Study on growth optimization and metallization of AlN thin films
    Liu, Zhen
    Zhang, Bin
    Zhu, Tao
    Chen, Yigang
    EIGHTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2013, 9068
  • [32] Growth of thin films
    Bauer, E
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1999, 11 (48) : 9365 - 9385
  • [33] Growth of thin films
    J Phys Condens Matter, 48 (9365-9385):
  • [34] Spectroscopic ellipsometer for thin film measurement
    不详
    INDUSTRIAL DIAMOND REVIEW, 2007, (01): : 14 - 14
  • [35] AN ELLIPSOMETER FOR FOLLOWING FILM GROWTH
    ORD, JL
    SURFACE SCIENCE, 1969, 16 : 155 - &
  • [36] Design of a spectroscopic imaging ellipsometer
    Jin, Lianhua
    Uehara, Makoto
    Iwato, Takashi
    Iizuka, Yuki
    Kondoh, Eiichi
    Gelloz, Bernard
    OPTICAL TECHNOLOGY AND MEASUREMENT FOR INDUSTRIAL APPLICATIONS 2020, 2020, 11523
  • [37] Spectroscopic ellipsometer for ultra thin film
    Akashika, Kumiko
    Shiota, Shuji
    Yamaguchi, Shinji
    Horie, Masahiro
    Kobayashi, Masayoshi
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII, PTS 1 AND 2, 2008, 6922 (1-2):
  • [38] DESIGN AND PERFORMANCE OF A VUV ELLIPSOMETER
    JOHNSON, RL
    BARTH, J
    CARDONA, M
    FUCHS, D
    BRADSHAW, AM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 290 (2-3): : 606 - 612
  • [39] DISCUSSION OF A HIGH SPEED PRECISION AUTOMATIC ELLIPSOMETER
    ASPNES, DE
    CAHAN, BD
    JERRARD, HG
    GENSHAW, M
    SURFACE SCIENCE, 1969, 16 : 175 - &
  • [40] NEW-TYPE OF AUTOMATIC ELLIPSOMETER.
    Xie Beixing
    Guangxue Xuebao/Acta Optica Sinica, 1984, 4 (10): : 946 - 950
12345