NEW-TYPE OF AUTOMATIC ELLIPSOMETER.

被引：0
|
作者：
Xie Beixing
机构：
来源：
Guangxue Xuebao/Acta Optica Sinica | 1984年 / 4卷 / 10期
关键词：
SILICA - Thin Films - THICKNESS MEASUREMENT - Automation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In this paper, we describe a new electro-optical compensated automatic ellipsometer. The design principles are discussed in detail and the measurement results on SiO//2 film are given. A new type of automatic spectrum-ellipsometer may be developed based on it.
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页码：946 / 950
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