INTRODUCTION OF HYDROGEN IN SIO2-FILMS BY EXPOSURE TO A HYDROGEN PLASMA

被引：0
|
作者：
STEIN, HJ [1 ]
PEERCY, PS [1 ]
机构：
[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C328 / C328
页数：1
相关论文
共 50 条
  • [41] TRAPPING CENTERS IN SPUTTERED SIO2-FILMS
    WRIGHT, SW
    ANDERSON, JC
    THIN SOLID FILMS, 1979, 62 (01) : 89 - 96
  • [42] SURFACE MECHANISMS IN THE UVCVD OF SIO2-FILMS
    LICOPPE, C
    MERIADEC, C
    FLICSTEIN, J
    NISSIM, YI
    PETIT, E
    MOISON, JM
    JOURNAL DE PHYSIQUE IV, 1991, 1 (C2): : 357 - 364
  • [43] SURFACE MECHANISMS IN THE UVCVD OF SIO2-FILMS
    LICOPPE, C
    MERIADEC, C
    NISSIM, YI
    MOISON, JM
    APPLIED SURFACE SCIENCE, 1992, 54 : 445 - 452
  • [44] HOLE TRANSPORT AND TRAPPING IN SIO2-FILMS
    POWELL, RJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : C85 - C85
  • [45] INFLUENCE OF ION ENERGY ON THE PHYSICAL-PROPERTIES OF PLASMA DEPOSITED SIO2-FILMS
    JOUBERT, O
    BURKE, R
    VALLIER, L
    MARTINET, C
    DEVINE, RAB
    APPLIED PHYSICS LETTERS, 1993, 62 (03) : 228 - 230
  • [46] NEW RESULTS OF DEGRADATION EFFECTS IN SIO2-FILMS
    KRAUSE, H
    SCHULZE, H
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 124 (01): : 191 - 198
  • [47] ON THE BREAKDOWN STATISTICS OF VERY THIN SIO2-FILMS
    SUNE, J
    PLACENCIA, I
    BARNIOL, N
    FARRES, E
    MARTIN, F
    AYMERICH, X
    THIN SOLID FILMS, 1990, 185 (02) : 347 - 362
  • [48] EFFECTS OF POSTOXIDATION ANNEAL ON THIN SIO2-FILMS
    ARIMA, H
    KOHNO, Y
    AJIKA, N
    MATSUKAWA, T
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : C130 - C130
  • [49] CONTACT POTENTIAL MEASUREMENTS ON THIN SIO2-FILMS
    BESS, M
    OSWALD, R
    OHRING, M
    SOLID-STATE ELECTRONICS, 1974, 17 (08) : 813 - 817
  • [50] GROWTH AND STRUCTURE OF NONCRYSTALLINE SIO2-FILMS ON SILICON
    REVESZ, AG
    MRSTIK, BJ
    HUGHES, HL
    JOURNAL DE PHYSIQUE, 1985, 46 (C-8): : 495 - 498
12345