THIN-FILM GAS SENSORS WITH ORGANICALLY MODIFIED SILICATES FOR THE MEASUREMENT OF SO2

被引：21
|
作者：
LIN, J
MOLLER, S
OBERMEIER, E
机构：
[1] Technical University of Berlin, Berlin
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1991年 / 5卷 / 1-4期
关键词：
D O I：
10.1016/0925-4005(91)80250-N
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Gas sensors based on interdigital capacitors (IDC), with organically modified silicates as a sensitive layer, have been developed for the measurement of SO2 concentrations between 0.5 vpm and some 6000 vpm. The gas-sensitive coating is produced with the sol-gel process and spin-on technique. These sensors are distinguished by good reproducibility and reversibility, a short response time (< 20 s), low cross-sensitivity to other gases, and low dependence on temperature and humidity. The sensor concept, design, manufacture and measurements in a gaseous atmosphere as well as the cross-sensitivity to humidity are discussed.
引用
收藏
页码：219 / 221
页数：3
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