REFRACTORY-METAL SILICIDES IN MICROELECTRONIC VLSI

被引：0
|
作者：
DENEUVILLE, A
机构：
来源：
ANNALES DE CHIMIE-SCIENCE DES MATERIAUX | 1986年 / 11卷 / 08期
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：603 / 613
页数：11
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