REACTIVE ION ETCHING OF GALLIUM-ARSENIDE

被引：0
|
作者：
AVTIUSHKOV, AP
LABUNOV, VA
STEKOLNIKOV, AF
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(89)90834-3
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：496 / 499
页数：4
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