NOVEL PHOTOACOUSTIC-SPECTROSCOPY OF SEMICONDUCTOR THIN-FILMS BY A TRANSPARENT TRANSDUCER - PYROELECTRIC AND PIEZOELECTRIC EFFECTS

被引：4

作者：

KANEMITSU, Y ^{[1
]}

NABETA, H ^{[1
]}

机构：

[1] CHIBA UNIV,DEPT IMAGE SCI & TECHNOL,CHIBA 280,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.105374

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have studied the generation mechanism of photoacoustic (PA) signals in semiconductor thin films by means of a transparent LiNbO3 transducer both experimentally and theoretically. In the transparent transducer method, the PA signal was detected at the light-irradiated surface of the samples. The PA signal of the thin film directly attached to the transducer is mainly due to the pyroelectric effect, and the PA signal of the underlain substrate is the piezoelectric signal caused by sample bending. These results show that this method becomes a powerful tool for measuring optical and thermal properties of thin films on the substrate nondestructively.

引用

页码：715 / 717

页数：3

共 43 条

[41] COMPOSITION AND ELECTRON STRESS EFFECTS IN SILICON-NITRIDE THIN-FILMS MADE BY THERMAL GROWTH AND CHEMICAL ETCHING OF LPCVD MNOS STRUCTURES AS STUDIED BY X-RAY PHOTO-ELECTRON SPECTROSCOPY (XPS)
WURZBACH, JA
GRUNTHANER, FJ
MASERJIAN, J
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (04): : 962 - 965
[42] LOW-ENERGY ION-SCATTERING SPECTROSCOPY OBSERVATIONS OF C-AXIS-ORIENTED YBA2CU3O7-X THIN-FILMS - EFFECTS OF IN-VACUUM ANNEALING
TANAKA, S
NAKAMURA, T
IIYAMA, M
YOSHIDA, N
TAKANO, S
SHOJI, F
OURA, K
APPLIED PHYSICS LETTERS, 1991, 59 (27) : 3637 - 3639
[43] NOVEL CHEMICAL-ANALYSIS FOR THIN-FILMS - SCANNING ELECTRON-MICROSCOPY AND TOTAL-REFLECTION-ANGLE X-RAY SPECTROSCOPY (SEM-TRAXS) - X-RAY TAKE-OFF ANGLE EFFECT
USUI, T
KAMEI, M
AOKI, Y
MORISHITA, T
TANAKA, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (9B): : L1689 - L1691

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