PLASMA-ETCHING FOR III-V COMPOUND DEVICES .2.

被引：0

作者：

IBBOTSON, DE

FLAMM, DL

机构：

来源：

SOLID STATE TECHNOLOGY | 1988年 / 31卷 / 11期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：105 / &

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[1] PLASMA-ETCHING FOR III-V COMPOUND DEVICES .1.
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