MEASUREMENT OF VLSI POWER-SUPPLY CURRENT BY ELECTRON-BEAM PROBING

被引：9

作者：

JENKINS, KA

FRANCH, RL

机构：

[1] IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, NY

来源：

IEEE JOURNAL OF SOLID-STATE CIRCUITS | 1992年 / 27卷 / 06期

关键词：

D O I：

10.1109/4.135341

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board.

引用

页码：948 / 950

页数：3

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