MEASUREMENT OF FILM THICKNESS ON INTEGRATED-CIRCUITS USING ENERGY DISPERSIVE-X-RAY ANALYSIS (EDXA)

被引：0

作者：

SARTORE, RG ^{[1
]}

机构：

[1] USA,LABCOM,SLCET IB R,FT MONMOUTH,NJ 07703

来源：

SCANNING MICROSCOPY | 1987年 / 1卷 / 01期

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D O I：

暂无

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：41 / 49

页数：9

共 50 条

[1] DEFECT DETECTION AND THICKNESS MAPPING OF PASSIVATION LAYERS ON INTEGRATED-CIRCUITS USING ENERGY DISPERSIVE-X-RAY ANALYSIS AND IMAGE-PROCESSING TECHNIQUES
SARTORE, RG
[J]. SCANNING MICROSCOPY, 1988, 2 (03) : 1383 - 1395
[2] PREPARATION OF STANDARDS FOR THIN-FILM THICKNESS MEASUREMENTS BY ENERGY DISPERSIVE-X-RAY ANALYSIS
KAMMLOTT, GW
[J]. APPLIED SPECTROSCOPY, 1981, 35 (03) : 324 - 328
[3] THIN-FILM ANALYSIS OF CLAY PARTICLES USING ENERGY DISPERSIVE-X-RAY ANALYSIS
WHITE, GN
BERKHEISER, VE
BLANCHARD, FN
HALLMARK, CT
[J]. CLAYS AND CLAY MINERALS, 1982, 30 (05) : 375 - 382
[4] ENERGY DISPERSIVE-X-RAY FLUORESCENCE ANALYSIS OF MINERAL ORES IN LAYERS OF INTERMEDIATE THICKNESS
KNYAZEV, BB
POPOV, AM
POTREBENIKOV, GK
[J]. INDUSTRIAL LABORATORY, 1991, 57 (09): : 926 - 928
[5] DIAGNOSIS OF SILICOSIS BY ENERGY DISPERSIVE-X-RAY ANALYSIS
FUNAHASHI, A
SIEGESMUND, KA
PINTAR, K
[J]. AMERICAN REVIEW OF RESPIRATORY DISEASE, 1978, 117 (04): : 235 - 235
[6] ENERGY DISPERSIVE-X-RAY ANALYSIS OF AMALGAM TATTOO
MCGINNIS, JP
HEMBREE, JH
LEWIS, RA
[J]. JOURNAL OF DENTAL RESEARCH, 1977, 56 : B79 - B79
[7] ENERGY DISPERSIVE-X-RAY ANALYSIS OF WELDERS PNEUMOCONIOSIS
FUNAHASHI, A
SCHLUETER, DP
SIEGESMUND, KA
PINTAR, K
[J]. AMERICAN REVIEW OF RESPIRATORY DISEASE, 1979, 119 (04): : 215 - 215
[8] BIOLOGICAL STANDARDS FOR ENERGY DISPERSIVE-X-RAY ANALYSIS
VALLYATHAN, NV
BRODY, AR
CRAIGHEAD, JE
[J]. JOURNAL OF ENVIRONMENTAL PATHOLOGY AND TOXICOLOGY, 1979, 3 (1-2) : 269 - 280
[9] ENERGY DISPERSIVE-X-RAY ANALYSIS OF CATARACTOUS LENSES
HARDING, C
SUSAN, S
WORGUL, B
SOLWAY, A
MASER, M
[J]. BIOLOGICAL BULLETIN, 1978, 155 (02): : 442 - 443
[10] ENERGY DISPERSIVE-X-RAY ANALYSIS IN STUDY OF PNEUMOCONIOSIS
FUNAHASHI, A
SIEGESMUND, KA
DRAGEN, RF
PINTAR, K
[J]. BRITISH JOURNAL OF INDUSTRIAL MEDICINE, 1977, 34 (02): : 95 - 101

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