DEFECT DETECTION AND THICKNESS MAPPING OF PASSIVATION LAYERS ON INTEGRATED-CIRCUITS USING ENERGY DISPERSIVE-X-RAY ANALYSIS AND IMAGE-PROCESSING TECHNIQUES

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SARTORE, RG

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SCANNING MICROSCOPY | 1988年 / 2卷 / 03期

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TH742 [显微镜];

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页码：1383 / 1395

页数：13

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