MEASUREMENT OF FILM THICKNESS ON INTEGRATED-CIRCUITS USING ENERGY DISPERSIVE-X-RAY ANALYSIS (EDXA)

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作者：
SARTORE, RG [1 ]
机构：
[1] USA,LABCOM,SLCET IB R,FT MONMOUTH,NJ 07703
来源：
SCANNING MICROSCOPY | 1987年 / 1卷 / 01期
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TH742 [显微镜];
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页码：41 / 49
页数：9
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