THE EFFECTS OF SUBSTRATE HEATING AND ION CLEANING ON THICK-FILM ADHESION

被引：12
|
作者：
COAD, JP
DUGDALE, RA
MARTINDALE, LP
机构：
来源：
VACUUM | 1981年 / 31卷 / 8-9期
关键词：
D O I：
10.1016/S0042-207X(81)80044-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：365 / 370
页数：6
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