RF DISCHARGE IN ARGON WITH CYLINDRICAL DUST PARTICLES

被引：0

作者：

Chutov, Yu, I ^{[1
]}

Goedheer, W. J. ^{[2
]}

Kravchenko, O. Yu ^{[1
]}

Levada, G., I ^{[1
]}

Lisitchenko, T. E. ^{[1
]}

Romanenko, R. O. ^{[1
]}

机构：

[1] Taras Shevchenko Kiev Univ, Fac Radio Phys, Kiev, Ukraine

[2] FOM Inst Plasma Phys Rijnhuizen, Nieuwegein, Netherlands

来源：

PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2005年 / 02期

关键词：

D O I：

暂无

中图分类号：

O57 [原子核物理学、高能物理学];

学科分类号：

070202 ;

摘要：

Kinetic computer simulations of the low pressure RF discharge in argon with cylindrical and spherical dust particles are carried out using PIC/MCC method. The Monte Carlo technique is used to describe electron and ion collisions with neutral atoms, ions, and dust particles. Obtained results show the remarkable influence of the dust particle shape on spatial distributions of RF discharge parameters including the ion density and the dust particle charge. Possible reasons of the influence can be a difference of the collection effective cross-section between spherical and cylindrical dust particles with equal surfaces as well as the balance of charged particles in dusty RF discharges.

引用

页码：194 / 196

页数：3

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