RF DISCHARGE IN ARGON WITH CYLINDRICAL DUST PARTICLES

被引：0

作者：

Chutov, Yu, I ^{[1
]}

Goedheer, W. J. ^{[2
]}

Kravchenko, O. Yu ^{[1
]}

Levada, G., I ^{[1
]}

Lisitchenko, T. E. ^{[1
]}

Romanenko, R. O. ^{[1
]}

机构：

[1] Taras Shevchenko Kiev Univ, Fac Radio Phys, Kiev, Ukraine

[2] FOM Inst Plasma Phys Rijnhuizen, Nieuwegein, Netherlands

来源：

PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2005年 / 02期

关键词：

D O I：

暂无

中图分类号：

O57 [原子核物理学、高能物理学];

学科分类号：

070202 ;

摘要：

Kinetic computer simulations of the low pressure RF discharge in argon with cylindrical and spherical dust particles are carried out using PIC/MCC method. The Monte Carlo technique is used to describe electron and ion collisions with neutral atoms, ions, and dust particles. Obtained results show the remarkable influence of the dust particle shape on spatial distributions of RF discharge parameters including the ion density and the dust particle charge. Possible reasons of the influence can be a difference of the collection effective cross-section between spherical and cylindrical dust particles with equal surfaces as well as the balance of charged particles in dusty RF discharges.

引用

页码：194 / 196

页数：3

共 50 条

[21] Dust particles motion in back discharge
Krupa, A.
Lackowski, M.
Czech, T.
ELECTROSTATICS 2007, 2009, 142
[22] Radio frequency discharge with dust particles
Chutov, YI
Goedheer, WJ
Kravchenko, OY
Zuz, VM
Yan, M
PLASMA PROCESSING AND DUSTY PARTICLES, 2000, 382 : 69 - 79
[23] Dust particles in a spherical glow discharge
Fedoseev, A., V
Novopashin, S. A.
Sakhapov, S. Z.
Sukhinin, G., I
ALL RUSSIAN CONFERENCE WITH THE SCHOOL FOR YOUNG SCIENTISTS THERMOPHYSICS AND PHYSICAL HYDRODYNAMICS - 2016, 2016, 754 (1-10):
[24] Influence of dust particles on glow discharge
Polyakov, D. N.
Shumova, V. V.
Vasilyak, L. M.
Fortov, V. E.
PHYSICA SCRIPTA, 2010, 82 (05)
[25] Diffusion model of cylindrical magnetron discharge in argon.
Golubovskii, YB
Porokhova, IA
Csambal, C
Behnke, J
Behnke, JF
INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS, 1999, : 139 - 140
[26] Numerical Model of an Argon Atmospheric Pressure RF Discharge
Balcon, N.
Hagelaar, G. J. M.
Boeuf, J. P.
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2008, 36 (05) : 2782 - 2787
[27] Observation of striations in RF hollow electrode discharge in argon
He, Liuliang
He, Feng
Bai, Zhili
Ouyang, Jiting
PHYSICS OF PLASMAS, 2019, 26 (10)
[28] TEMPERATURE AND ELECTRON DENSITY MEASUREMENTS IN AN RF DISCHARGE IN ARGON
JOHNSTON, PD
PHYSICS LETTERS, 1966, 20 (05): : 499 - &
[29] Precession of cylindrical dust particles in the plasma sheath
Banu, N.
Ticos, C. M.
PHYSICS OF PLASMAS, 2015, 22 (10)
[30] Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure
Wang, Yinan
Liu, Yue
Zheng, Shu
Lin, Guoqiang
JOURNAL OF PLASMA PHYSICS, 2012, 78 : 673 - 676

← 1 2 3 4 5 →