SURFACE RECONSTRUCTION AND INTERFACE FORMATION IN SI AND GAAS

被引：15
|
作者：
KATNANI, AD
STOFFEL, NG
EDELMAN, HS
MARGARITONDO, G
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
关键词：
D O I：
10.1116/1.571051
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：290 / 293
页数：4
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