Feedback-Controlled X-Ray Diffraction Topography

被引：12
|
作者：
van Mellaert, L. J. [1 ]
Schwuttke, G. H. [1 ]
机构：
[1] Int Business Machines Corp, East Fishkill Labs, Hopewell Jct, NY 12533 USA
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1970年 / 3卷 / 03期
关键词：
D O I：
10.1002/pssa.19700030315
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A feedback-controlled scanning X-ray diffraction topography system is described. The system is based on automated Bragg angle control (ABAC). ABAC maintains the operation of the topographic system at all times at the maximum X-ray intensity for exposing the photographic plate. The automatic control is accomplished by a continuous measurement. of the angular derivative of the X-ray rocking curve. The measurement signal is applied to m automatic control system which orients the crystal for operation at the peak of the rocking curve at all times while scanning. A significant reduction in exposure time and background scattering is thus obtained. Picture sharpness is improved and the recording of entire topographs of warped crystal wafers is accomplished.
引用
收藏
页码：687 / 696
页数：10
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