PHOTOACOUSTIC OPTICAL AND THERMAL CHARACTERIZATION OF SI AND GAAS ION-IMPLANTED LAYERS

被引：31
|
作者：
ZAMMIT, U [1 ]
MARINELLI, M [1 ]
SCUDIERI, F [1 ]
MARTELLUCCI, S [1 ]
机构：
[1] CNR,NAZL ELETTRON QUANTIST & PLASMI GRP,I-00185 ROMA,ITALY
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 13期
关键词：
D O I：
10.1063/1.98058
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：830 / 832
页数：3
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