ELECTRICAL CHARACTERISTICS OF COPPER POLYIMIDE THIN-FILM MULTILAYER INTERCONNECTS

被引：4
|
作者：
LANE, TA
BELCOURT, FJ
JENSEN, RJ
机构：
来源：
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY | 1987年 / 10卷 / 04期
关键词：
D O I：
10.1109/TCHMT.1987.1134780
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：577 / 585
页数：9
相关论文
共 50 条
  • [1] ELECTRICAL CHARACTERISTICS OF COPPER/POLYIMIDE THIN-FILM MULTILAYER INTERCONNECTS.
    Lane, Thomas A.
    Belcourt, Frank J.
    Jensen, Ronald J.
    1600, (CHMT-10):
  • [2] Electrical performance of interconnects in polyimide-copper thin-film multilayers on ceramic substrate
    Bedouani, M
    Lambert, D
    Kurzweil, K
    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING, 1996, 19 (02): : 382 - 390
  • [3] FABRICATION OF THIN-FILM MULTILAYER SUBSTRATE USING COPPER CLAD POLYIMIDE SHEETS
    MIURA, O
    MIYAZAKI, K
    TAKAHASHI, A
    WATANABE, R
    MIWA, T
    IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1993, 16 (08): : 817 - 821
  • [4] STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF COPPER INDIUM DISULFIDE THIN-FILM
    PARK, GC
    YOO, YT
    LEE, J
    SYNTHETIC METALS, 1995, 71 (1-3) : 1745 - 1746
  • [5] Copper phthalocyanine thin-film transistors with polyimide as dielectric
    Zhen, Lijuan
    Shang, Liwei
    Liu, Ming
    Liu, Ge
    EDSSC: 2007 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS, VOLS 1 AND 2, PROCEEDINGS, 2007, : 1075 - 1077
  • [6] QUANTITATIVE MEASUREMENT OF THE STRESS TRANSFER-FUNCTION IN NICKEL/POLYIMIDE THIN-FILM COPPER THIN-FILM STRUCTURES
    SCHADLER, L
    NOYAN, IC
    APPLIED PHYSICS LETTERS, 1995, 66 (01) : 22 - 24
  • [7] APPLICATION OF PHOTOSENSITIVE, LOW-CTE POLYIMIDE FOR THIN-FILM MULTILAYER SUBSTRATES
    HASEGAWA, S
    NEC RESEARCH & DEVELOPMENT, 1993, 34 (03): : 314 - 319
  • [8] Bridge Burst Characteristics of Aluminum and Copper Thin-Film Bridges in Electrical Initiation Devices
    Kim, Kyoungjin
    Kim, Kyu-Hyoung
    Jang, Seung-gyo
    KOREAN JOURNAL OF METALS AND MATERIALS, 2018, 56 (03): : 235 - 243
  • [9] Oxide Thin-Film Transistors Fabricated on Polyimide Film: Bending Stability and Electrical Properties
    Nakata, Mitsuru
    Tsuji, Hiroshi
    Motomura, Genichi
    Nakajima, Yoshiki
    Takei, Tatsuya
    Fujisaki, Yoshihide
    Shimidzu, Naoki
    Yamamoto, Toshihiro
    IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS, 2016, 52 (06) : 5213 - 5218
  • [10] Woven Thin-Film Metal Interconnects
    Cherenack, Kunigunde H.
    Kinkeldei, Thomas
    Zysset, Christoph
    Troester, Gerhard
    IEEE ELECTRON DEVICE LETTERS, 2010, 31 (07) : 740 - 742
12345