STRUCTURAL CHARACTERIZATION OF PREFERENTIALLY ORIENTED CUBIC BN FILMS GROWN ON SI (001) SUBSTRATES

被引：35
|
作者：
BALLAL, AK [1 ]
SALAMANCARIBA, L [1 ]
TAYLOR, CA [1 ]
DOLL, GL [1 ]
机构：
[1] GM CORP,DEPT PHYS,RES LABS,WARREN,MI 48090
来源：
THIN SOLID FILMS | 1993年 / 224卷 / 01期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1016/0040-6090(93)90456-Y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin cubic boron nitride films have been deposited on (001) faces of silicon substrates using ion-assisted pulsed laser deposition. Infrared transmittance spectra of the films showed strong absorption at 1080 cm-1, indicating sp3 bonding of cubic symmetry of the deposited film. Cross-sectional and plan-view transmission electron microscopy showed the structure of the films to be cubic zinc-blende with a lattice constant of 0.362 nm. The films were found to be adherent and preferentially oriented with the cubic BN [110] axis parallel to the Si [001] direction.
引用
收藏
页码：46 / 51
页数：6
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