EXCIMER LASER PLANARIZATION OF PATTERNED METAL FEATURES

被引：4
|
作者：
BASEMAN, RJ
ANDRESHAK, JC
SCHNITZEL, RH
CRONIN, JE
机构：
[1] IBM CORP,DIV GEN TECHNOL,HOPEWELL JUNCTION,NY 12533
[2] IBM CORP,DIV GEN TECHNOL,ESSEX JUNCTION,VT 05452
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 05期
关键词：
D O I：
10.1116/1.584935
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1158 / 1160
页数：3
相关论文
共 50 条
  • [21] Cathodoluminescence study of ArF excimer laser-induced planarization of large grain diamond films
    Cremades, A
    Piqueras, J
    Solis, J
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) : 8118 - 8120
  • [22] Combination of high-temperature sputtering with excimer laser planarization for submicrometer contact via filling
    Yu, C.
    Sandhu, G.S.
    Doan, T.T.
    Journal of Applied Physics, 1992, 72 (04):
  • [23] Features of plasma produced by excimer laser at low intensities
    Vergunova, GA
    Magunov, AI
    Dyakin, VM
    Faenov, AY
    Pikuz, TA
    Skobelev, IY
    Batani, D
    Bossi, S
    Bernardinello, A
    Flora, F
    DiLazzaro, P
    Bollanti, S
    Lisi, N
    Letardi, T
    Reale, A
    Palladino, L
    Scafati, A
    Reale, L
    Osterheld, AL
    Goldstein, WH
    PHYSICA SCRIPTA, 1997, 55 (04): : 483 - 490
  • [24] Excimer Laser Patterned Holey Graphene Oxide Films for Nonenzymatic Electrochemical Sensing
    Joshi, Pratik
    Shukla, Shubhangi
    Gupta, Siddharth
    Riley, Parand R.
    Narayan, Jagdish
    Narayan, Roger
    ACS APPLIED MATERIALS & INTERFACES, 2022, 14 (32) : 37149 - 37160
  • [25] Effect of Planarization on the Contact Behavior of Patterned Media
    Nunez, Emerson Escobar
    Yeo, Chang-Dong
    Katta, Raja R.
    Polycarpou, Andreas A.
    IEEE TRANSACTIONS ON MAGNETICS, 2008, 44 (11) : 3667 - 3670
  • [26] Global Planarization of Device Patterned Si Wafers
    VDI Ber, 1276 (397):
  • [27] Global planarization of device patterned Si wafers
    Jeong, H
    2ND INTERNATIONAL CONFERENCE ON MACHINING OF ADVANCED MATERIALS (MAM), 1996, : 397 - 411
  • [28] Reshaping metal surfaces using excimer laser or copper vapor laser
    Esmiller, B
    Baudinaud, V
    ANNALES DE PHYSIQUE, 1997, 22 : 205 - 212
  • [29] Simulations and experiments on excimer laser micromachining of metal and polymer
    Akhtar, Syed Nadeem
    Choudhary, Hirendra
    Ramakrishna, S. Anantha
    Ramkumar, Janakarajan
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2014, 13 (01):
  • [30] Ceramics Surface Modification by Excimer Laser Metal Coating
    Weidou ZHU and Haicheng GU(Dept. of Materials Science and Engineering
    JournalofMaterialsScience&Technology, 1994, (06) : 463 - 465
12345