SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS ON SILVER SUBSTRATES BY INSITU PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：27
|
作者：
ZHAO, J
LI, YQ
CHERN, CS
NORRIS, P
GALLOIS, B
KEAR, B
WESSELS, BW
机构：
来源：
APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 01期
关键词：
D O I：
10.1063/1.104400
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa2Cu3O7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740-degrees-C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high T(c)) phase. X-ray diffraction measurements reveal that the films deposited at 740-degrees-C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.
引用
收藏
页码：89 / 91
页数：3
相关论文
共 50 条
  • [21] INSITU GROWTH OF YBCO HIGH-TC SUPERCONDUCTING THIN-FILMS BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION
    ZHAO, J
    CHERN, CS
    LI, YQ
    NOH, DW
    NORRIS, PE
    ZAWADZKI, P
    KEAR, B
    GALLOIS, B
    JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) : 699 - 704
  • [22] SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS PREPARED BY DC PLASMA CHEMICAL-VAPOR-DEPOSITION
    KANG, WN
    YOON, YS
    YOM, SS
    SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1994, 7 (06): : 333 - 336
  • [23] LOW-TEMPERATURE GROWTH OF SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    KANEHORI, K
    SUGHII, N
    FUKAZAWA, T
    MIYAUCHI, K
    THIN SOLID FILMS, 1989, 182 : 265 - 269
  • [24] SUPERCONDUCTING PROPERTIES OF YBA2CU3O7-X FILMS DEPOSITED BY CHEMICAL VAPOR-DEPOSITION
    THOMAS, O
    MOSSANG, E
    FICK, J
    WEISS, F
    MADAR, R
    SENATEUR, JP
    AGARWAL, SK
    SCHLENKER, C
    INGOLD, M
    GERMI, P
    PERNET, M
    PHYSICA C, 1991, 185 : 2113 - 2114
  • [25] INSITU GROWTH OF SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS
    HAUNG, CJ
    CHANG, CY
    CHEN, MC
    TSENG, TY
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (09) : 2305 - 2308
  • [26] INPLANE ORIENTATIONS AND GRAIN-BOUNDARIES OF YBA2CU3O7-X THIN-FILMS ON (001)MGO SUBSTRATES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    SUZUKI, H
    FUJIWARA, Y
    HIROTSU, Y
    YAMASHITA, T
    OIKAWA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (04): : 1601 - 1611
  • [27] PREPARATION OF YBA2CU3O7-X FILMS BY CHEMICAL VAPOR-DEPOSITION
    YAMANE, H
    KUROSAWA, H
    HIRAI, T
    CHEMISTRY LETTERS, 1988, (06) : 939 - 940
  • [28] Large critical current densities in YBa2Cu3O7-x thin films formed by plasma-enhanced metalorganic chemical vapor deposition at reduced temperature
    Zhao, J.
    Li, Y.Q.
    Chern, C.S.
    Huang, W.
    Norris, P.
    Gallois, B.
    Kear, B.
    Lu, P.
    Cosandey, F.
    Journal of Electronic Materials, 1991, 20 (04) : 341 - 343
  • [29] AEROSOL ASSISTED CHEMICAL VAPOR-DEPOSITION OF SUPERCONDUCTING YBA2CU3O7-X
    SALAZAR, KV
    OTT, KC
    DYE, RC
    HUBBARD, KM
    PETERSON, EJ
    COULTER, JY
    KODAS, TT
    PHYSICA C, 1992, 198 (3-4): : 303 - 308
  • [30] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF DOUBLE-SIDED YBA2CU3O7 THIN-FILMS
    DESISTO, WJ
    NEWMAN, HS
    HENRY, RL
    CESTONE, VC
    APPLIED PHYSICS LETTERS, 1993, 62 (14) : 1682 - 1684
12345