ELECTRICAL-PROPERTIES OF LIGHTLY DOPED POLYCRYSTALLINE SILICON

被引：14
|
作者：
LEE, JYM [1 ]
CHENG, IC [1 ]
机构：
[1] HUGHES AIRCRAFT CO,CARLSBAD RES CTR,CARLSBAD,CA 92008
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 01期
关键词：
D O I：
10.1063/1.329952
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：490 / 495
页数：6
相关论文
共 50 条
  • [1] ELECTRICAL-PROPERTIES OF LIGHTLY DOPED POLYCRYSTALLINE SILICON
    LEE, JYM
    CHENG, IC
    GATES, JL
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : C97 - C97
  • [2] ELECTRICAL-PROPERTIES OF POLYCRYSTALLINE SILICON
    SETO, JYW
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (03) : C115 - C115
  • [3] Electrical properties of excimer-laser-crystallized lightly doped polycrystalline silicon films
    Higashi, S
    Ozaki, K
    Sakamoto, K
    Kano, Y
    Sameshima, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (8A): : L857 - L860
  • [4] ELECTRICAL-PROPERTIES OF PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON FILMS CONTAMINATED WITH OXYGEN
    ANGELUCCI, R
    SEVERI, M
    SOLMI, S
    BALDI, L
    [J]. THIN SOLID FILMS, 1983, 103 (03) : 275 - 281
  • [5] ELECTRICAL-PROPERTIES OF HEAVILY-DOPED POLYCRYSTALLINE SILICON-GERMANIUM FILMS
    KING, TJ
    MCVITTIE, JP
    SARASWAT, KC
    PFIESTER, JR
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (02) : 228 - 232
  • [6] EFFECT OF ANNEALING ON THE ELECTRICAL-PROPERTIES OF POLYCRYSTALLINE SILICON
    MANDURAH, MM
    SARASWAT, KC
    HELMS, CR
    KAMINS, TI
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : C386 - C386
  • [7] ON THE ELECTRICAL-PROPERTIES OF POLYCRYSTALLINE DIAMOND FILMS ON SILICON
    DECESARE, G
    SALVATORI, S
    VINCENZONI, R
    ASCARELLI, P
    CAPPELLI, E
    PINZARI, F
    GALLUZZI, F
    [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) : 628 - 631
  • [8] ELECTRICAL-PROPERTIES OF POLYCRYSTALLINE SILICON UNDER OPTICAL ILLUMINATION
    BHATT, DP
    JOSHI, DP
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) : 2338 - 2345
  • [9] ELECTRICAL-PROPERTIES OF CRYSTALLIZED SEMIINSULATING POLYCRYSTALLINE SILICON FILMS
    CHO, WJ
    TAKEUCHI, Y
    KUWANO, H
    [J]. ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1994, 77 (01): : 77 - 86
  • [10] ELECTRICAL-PROPERTIES OF POLYCRYSTALLINE SILICON IN THE DARK AND UNDER ILLUMINATION
    TYAGI, BP
    SEN, K
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1985, 90 (02): : 709 - 713
12345